Accelerometers featuring high natural frequencies and superior overload capabilities are particularly valuable in applications such as military low-threshold-weapon fuzes.However,synergistic improve-ment of these para...Accelerometers featuring high natural frequencies and superior overload capabilities are particularly valuable in applications such as military low-threshold-weapon fuzes.However,synergistic improve-ment of these parameters is bottlenecked by the trade-off between sensitivity and natural frequency,and the trade-off between natural frequency and displacement limit.Here,via designing anti-overload structures integrated with the pure-axial-stressed sensing structure,we achieve simultaneous high natural frequency and superior overload capability.The proposed sensor is fabricated and characterized.Results yield a sensitivity of 0.037±0.002 mV/g at 2 V and a natural frequency of 31.35±0.72 kHz,comparable to the reference sensor,and an overload capability of 19445.80±290.55 g representing a 133.84%improvement.Accelerometers with high natural frequency and superior overload capability enable high-fidelity measurement of broadband signals under harsh environments.展开更多
Addressing the urgent need for high-temperature vector vibration monitoring in extreme environments such as aerospace and oil exploration,this paper proposes and develops a novel accelerometer based on femtosecond las...Addressing the urgent need for high-temperature vector vibration monitoring in extreme environments such as aerospace and oil exploration,this paper proposes and develops a novel accelerometer based on femtosecond laser-engraved eccentric fiber Bragg gratings(FBGs)and nickel-coated reflectors.This sensor employs a highly localized FBG with a 10 mm length and 1μm eccentricity fabricated within a single-mode fiber.It utilizes asymmetric refractive index modulation to achieve direction-sensitive cladding mode coupling.Simultaneously,a 30-nm-thick nickel film is sputter-deposited onto the fiber end-face to form a single-ended reflection structure.This design eliminates complex processes like fiber taper drawing and eccentric fusion splicing,overcoming the stability limitations of existing vector sensors at elevated temperatures.Experimental results demonstrate spectral stability across the 25℃-1020℃temperature range and effective vibration measurement at 800℃.At the room temperature and 800℃,the acceleration sensitivities are 0.169 V/g(R2=0.993)and 0.0743 V/g(R2=0.989),respectively,with a common frequency response range of 15 Hz-25 Hz.The maximum angular response sensitivities are 2.4 V/g and 1.2 V/g,respectively,fully validating its reliable vector detection capability across a wide temperature range.This study provides a compact,mechanically robust,and high-temperature-resistant solution for vibration monitoring in extreme environments.展开更多
This study focuses on the design and validation of a behavior classification system for cattle using behavioral data collected through accelerometer sensors.Data collection and behavioral analysis are achieved using m...This study focuses on the design and validation of a behavior classification system for cattle using behavioral data collected through accelerometer sensors.Data collection and behavioral analysis are achieved using machine learning(ML)algorithms through accelerometer sensors.However,behavioral analysis poses challenges due to the complexity of cow activities.The task becomes more challenging in a real-time behavioral analysis system with the requirement for shorter data windows and energy constraints.Shorter windows may lack sufficient information,reducing algorithm performance.Additionally,the sensor’s position on the cowsmay shift during practical use,altering the collected accelerometer data.This study addresses these challenges by employing a 3-s data window to analyze cow behaviors,specifically Feeding,Lying,Standing,and Walking.Data synchronization between accelerometer sensors placed on the neck and leg compensates for the lack of information in short data windows.Features such as the Vector of Dynamic Body Acceleration(VeDBA),Mean,Variance,and Kurtosis are utilized alongside the Decision Tree(DT)algorithm to address energy efficiency and ensure computational effectiveness.This study also evaluates the impact of sensor misalignment on behavior classification.Simulated datasets with varying levels of sensor misalignment were created,and the system’s classification accuracy exceeded 0.95 for the four behaviors across all datasets(including original and simulated misalignment datasets).Sensitivity(Sen)and PPV for all datasets were above 0.9.The study provides farmers and the dairy industry with a practical,energy-efficient system for continuously monitoring cattle behavior to enhance herd productivity while reducing labor costs.展开更多
In order to suppress the influence of temperature changes on the performance of accelerometers,a digital quartz resonant accelerometer with low temperature drift is developed using a quartz resonator cluster as a tran...In order to suppress the influence of temperature changes on the performance of accelerometers,a digital quartz resonant accelerometer with low temperature drift is developed using a quartz resonator cluster as a transducer element.In addition,a digital intellectual property(IP) is designed in FPGA to achieve signal processing and fusion of integrated resonators.A testing system for digital quartz resonant accelerometers is established to characterize the performance under different conditions.The scale factor of the accelerometer prototype reaches 3561.63 Hz/g in the range of -1 g to +1 g,and 3542.5 Hz/g in the range of-10 g to+10 g.In different measurement ranges,the linear correlation coefficient R~2 of the accelerometer achieves greater than 0.998.The temperature drift of the accelerometer prototype is tested using a constant temperature test chamber,with a temperature change from -20℃ to 80℃.After temperature-drift compensation,the zero bias temperature coefficient falls to 0.08 mg/℃,and the scale factor temperature coefficient is 65.43 ppm/℃.The experimental results show that the digital quartz resonant accelerometer exhibits excellent sensitivity and low temperature drift.展开更多
Along with process control,perception represents the main function performed by the Edge Layer of an Internet of Things(IoT)network.Many of these networks implement various applications where the response time does no...Along with process control,perception represents the main function performed by the Edge Layer of an Internet of Things(IoT)network.Many of these networks implement various applications where the response time does not represent an important parameter.However,in critical applications,this parameter represents a crucial aspect.One important sensing device used in IoT designs is the accelerometer.In most applications,the response time of the embedded driver software handling this device is generally not analysed and not taken into account.In this paper,we present the design and implementation of a predictable real-time driver stack for a popular accelerometer and gyroscope device family.We provide clear justifications for why this response time is extremely important for critical applications in the acquisition process of such data.We present extensive measurements and experimental results that demonstrate the predictability of our solution,making it suitable for critical real-time systems.展开更多
A high precision detection technique is analyzed based on the optical micro electro-mechanical system(MEMS)accelerometer with double gratings for noise suppression and scale factor enhancement.The brief sensing model ...A high precision detection technique is analyzed based on the optical micro electro-mechanical system(MEMS)accelerometer with double gratings for noise suppression and scale factor enhancement.The brief sensing model and modulation detection model are built using the phase sensitive detection,and the relationship between stimulated acceleration and system output is given.The schematics of gap modulation and light intensity modulation are analyzed respectively,and the choice of modulation frequency in the optical MEMS accelerometer system is discussed.According to the experimental results,the scale factor is improved from 15.45 V/g with the gap modulation to 18.78 V/g with the light intensity modulation,and the signal to noise ratio is improved from 42.95 dB to 81.73 dB.The overall noise level in the optical MEMS accelerometer is effectively suppressed.展开更多
Type 2 diabetes(T2D)is a global public health issue.In 2021,537 million adults were diagnosed with T2D,corresponding to 10.5%of adults aged 20 and older.1T2D increases the risks for morbidity,disability,and prematu...Type 2 diabetes(T2D)is a global public health issue.In 2021,537 million adults were diagnosed with T2D,corresponding to 10.5%of adults aged 20 and older.1T2D increases the risks for morbidity,disability,and premature mortality,which increased by 3%between 2000 and 2019.2 Evidence is strong that maintaining a healthy diet,engaging in regular physical activity(PA),and preventing obesity can prevent or delay the incidence of T2D.展开更多
Vibration detection using sensors with both wide working frequency range,good sensitivity,and other good performances is a topic of great interest in fields such as inertial navigation,deep-sea fishing boat engines co...Vibration detection using sensors with both wide working frequency range,good sensitivity,and other good performances is a topic of great interest in fields such as inertial navigation,deep-sea fishing boat engines condition monitoring,seismic monitoring,attitude,and heading reference system,etc.This paper investigates two 6H-SIC MEMS diaphragms,one triangular and the other square,used in a fiber optic Fabry–Perot(FP)accelerometer in an experimental scenario.The triangular chip shows a wide working frequency range of 630 Hz–5300 Hz,a natural frequency of 44.3 k Hz,and a mechanical sensitivity of 0.154 nm/g.An optimal structure of the square chip used in a probe such as a fiber optic FP accelerometer also shows a wide working frequency range of 120 Hz–2300 Hz;a good sensitivity of 31.5 m V/g,a resonance frequency of7873 Hz,an accuracy of 0.96%F.S.,a frequency measurement error of 1.15%,and an excellent linearity of 0.9995.展开更多
Device-based measurements are recommended to improve population-based physical activity(PA)surveillance.1,2However,implementation remains challenging due to lack of consensus on analytical methods,and the most widely ...Device-based measurements are recommended to improve population-based physical activity(PA)surveillance.1,2However,implementation remains challenging due to lack of consensus on analytical methods,and the most widely used“generic”(absolute intensity)cut-point approach has limited generalisability to population-level free-living data.Further,current methods generally fail to account for differences in people's physical capacity.展开更多
In order to get rid of the dependence on high-precision centrifuges in accelerometer nonlinear coefficients calibration,this paper proposes a system-level calibration method for field condition.Firstly,a 42-dimension ...In order to get rid of the dependence on high-precision centrifuges in accelerometer nonlinear coefficients calibration,this paper proposes a system-level calibration method for field condition.Firstly,a 42-dimension Kalman filter is constructed to reduce impact brought by turntable.Then,a biaxial rotation path is designed based on the accelerometer output model,including orthogonal 22 positions and tilt 12 positions,which enhances gravity excitation on nonlinear coefficients of accelerometer.Finally,sampling is carried out for calibration and further experiments.The results of static inertial navigation experiments lasting 4000 s show that compared with the traditional method,the proposed method reduces the position error by about 390 m.展开更多
Objectives:Valid estimation of energy expenditure remains a challenge,particularly when using ankle-and thighworn devices.The Move 4 is a research-grade accelerometer previously tested for predicting metabolic equival...Objectives:Valid estimation of energy expenditure remains a challenge,particularly when using ankle-and thighworn devices.The Move 4 is a research-grade accelerometer previously tested for predicting metabolic equivalents(METs)when worn at the waist or wrist.This study aimed to calibrate and evaluate regression models to estimate METs from Move 4 data when worn at the ankle and thigh.Methods:Participants completed walking and jogging tasks under laboratory conditions while wearing Move 4 sensors and with indirect calorimetry as a reference measure.Models were calibrated using study 1(n=160)and evaluated in an independent dataset(study 2;n=15).Performance was assessed using mean absolute error(MAE),root mean square error(RMSE),and Bland-Altman analyses.Results:The MET models demonstrated strong agreement across both locations and datasets.For the thigh position,the MAE ranged from 0.60 METs(walking)to 1.38 METs(jogging),with RMSE of 0.82 and 1.70 in the evaluation data.Calibration metrics were comparable(jogging:MAE=1.24,RMSE=1.63).The ankle models showed similar accuracy,with MAEs of 0.66(walking)and 1.39(jogging),and RMSEs of 0.85 and 1.67,respectively.Systematic bias remained low(mean differences between−0.34 and−0.01 METs).Conclusions:This study provides the first calibration and evaluation for estimating METs from ankle-and thigh-worn Move 4 accelerometers.The model indicated accurate,highresolution MET estimation for walking and jogging.Future work should expand independent performance evaluations,including diverse activities such as static activities,and diverse samples under free-living conditions.展开更多
Micro-Opto-Electro-Mechanical Systems(MOEMS)accelerometer is a new type of accelerometer which combines the merits of optical measurement and Micro-Electro-Mechanical Systems(MEMS)to enable high precision,small volume...Micro-Opto-Electro-Mechanical Systems(MOEMS)accelerometer is a new type of accelerometer which combines the merits of optical measurement and Micro-Electro-Mechanical Systems(MEMS)to enable high precision,small volume and anti-electromagnetic disturbance measurement of acceleration.In recent years,with the in-depth research and development of MOEMS accelerometers,the community is flourishing with the possible applications in seismic monitoring,inertial navigation,aerospace and other industrial and military fields.There have been a variety of schemes of MOEMS accelerometers,whereas the performances differ greatly due to different measurement principles and corresponding application requirements.This paper aims to address the pressing issue of the current lack of systematic review of MOEMS accelerometers.According to the optical measurement principle,we divide the MOEMS accelerometers into three categories:the geometric optics based,the wave optics based,and the new optomechanical accelerometers.Regarding the most widely studied category,the wave optics based accelerometers are further divided into four sub-categories,which is based on grating interferometric cavity,Fiber Bragg Grating(FBG),Fabry-Perot cavity,and photonic crystal,respectively.Following a brief introduction to the measurement principles,the typical performances,advantages and disadvantages as well as the potential application scenarios of all kinds of MOEMS accelerometers are discussed on the basis of typical demonstrations.This paper also presents the status and development tendency of MOEMS accelerometers to meet the ever-increasing demand for high-precision acceleration measurement.展开更多
MEMS accelerometers are widely used in various fields due to their small size and low cost,and have good application prospects.However,the low accuracy limits its range of applications.To ensure data accuracy and safe...MEMS accelerometers are widely used in various fields due to their small size and low cost,and have good application prospects.However,the low accuracy limits its range of applications.To ensure data accuracy and safety we need to calibrate MEMS accelerometers.Many authors have improved accelerometer accuracy by calculating calibration parameters,and a large number of published calibration methods have been confusing.In this context,this paper introduces these techniques and methods,analyzes and summarizes the main error models and calibration procedures,and provides useful suggestions.Finally,the content of the accelerometer calibration method needs to be overcome.展开更多
Purpose:This study was aimed to determine associations of accelerometer-determined time and bouts of sedentary behavior,light physical activity(LPA),and moderate-to-vigorous PA(MVPA)with sarcopenia and incident falls ...Purpose:This study was aimed to determine associations of accelerometer-determined time and bouts of sedentary behavior,light physical activity(LPA),and moderate-to-vigorous PA(MVPA)with sarcopenia and incident falls over 12 months.Methods:A total of 3334 Swedish 70-year-olds were assessed for sarcopenia,as defined by the revised definition of the European Working Group on Sarcopenia in Older People.Assessments were based on low scores for appendicular lean mass(dual-energy X-ray absorptiometry),hand grip strength,and the Timed Up and Go test.For 7 days after baseline,total time and total number of bouts(≥10 min of continuous activity at a given intensity)of activity performed at sedentary,LPA,and MVPA intensities were assessed by accelerometer.Incident falls were self-reported 6 months and 12 months after baseline.Results:Only 1.8%of participants had probable or confirmed sarcopenia.After multivariable adjustment for other levels of activity,only greater MVPA time was associated with a decreased likelihood of having low appendicular lean mass,low hand grip strength,and slow Timed Up and Go time as defined by the European Working Group on Sarcopenia in Older People criteria(all p0.05).Conclusion:Higher amounts of accelerometer-determined MVPA are consistently associated with a decreased likelihood of sarcopenia and its components,regardless of the length of bouts or amounts of sedentary behavior.展开更多
For the purpose of improving the precision of the inertial guidance system,it is necessary to enhance the accuracy of the accelerometer.Combining the micro-fabrication processes with resonant sensor technology,a high-...For the purpose of improving the precision of the inertial guidance system,it is necessary to enhance the accuracy of the accelerometer.Combining the micro-fabrication processes with resonant sensor technology,a high-resolution inertial-grade novel micro resonant accelerometer is studied.Based on the detecting theory of the resonant sensors,the accelerometer is designed,fabricated,and tested.The accelerometer consists of one proofmass,two micro leverages and two double-ended-tuning-fork (DETF) resonators.The sensing principle of this accelerometer is based on that the natural frequency of the DETF resonator shifts with its axial load which is caused by inertial force.The push-pull configuration of the DETF is for temperature compensation.The two-stage micro leverage mechanisms are employed to amplify the force and increase the sensitivity of the accelerometer.The micro leverage and the resonator are modeled for static analysis and nonlinear modal analysis via theory method and finite element method (FEM),respectively.The geometrical parameters of them are optimized.The amplification factor of the leverage is 102,and the sensitivity of the resonator on theory is about 62 Hz/g.The samples of the accelerometer are fabricated with deep reactive ion etching (DRIE) technology which can get a high-aspect ratio structure for contributing a greater sensing-capacitance.The measuring results of the samples by scanning electron microscopy (SEM) show that the process is feasible,because of the complete structure,the sound combs and micro leverages,and the acceptable errors.The frequency of the resonator and the sensitivity of the accelerometer are tested via printed circuit board (PCB),respectively.The result of the test shows that the frequency of the push-resonator is about 54 530 Hz and the sensitivity of the accelerometer is about 55 Hz/g.The amplification factor of the leverage is calculated more accurately because the coupling of the two stages leverage is considered during derivation of the analysis formula.In addition,the novel differential structure of the accelerometer can greatly improve the sensitivity of the accelerometers.展开更多
For the vector attitude determination, the traditional optimal algorithms which are based on quaternion estimator(QUEST) measurement noise model are complicated for just two observations. In our application, the mag...For the vector attitude determination, the traditional optimal algorithms which are based on quaternion estimator(QUEST) measurement noise model are complicated for just two observations. In our application, the magnetometer and accelerometer are not two comparable kinds of sensors and both are not small field-of-view sensors as well. So in this paper a new unit measurement model is derived. According to the Wahba problem, the optimal weights for each measurement are obtained by the error variance researches. Then an improved quaternion Gauss–Newton method is presented and adopted to acquire attitude. Eventually, simulation results and experimental validation employed to test the proposed method demonstrate the usefulness of the improved algorithm.展开更多
This paper proposes a novel method for calibrating error coefficients of the quartz accelerometer faster on the dynamic centrifuge,which can generate a continuous dynamic acceleration excitation.Firstly,working princi...This paper proposes a novel method for calibrating error coefficients of the quartz accelerometer faster on the dynamic centrifuge,which can generate a continuous dynamic acceleration excitation.Firstly,working principle and structure of the dynamic centrifuge are analyzed,the error sources and the uncertainty of the dynamic centrifuge are expounded,and relevant coordinate systems are established.Then,according to the characteristics of the input specific forces and the propagating methods of the error sources,the accurate input specific forces acted on the input reference axes of accelerometer are obtained.Based on the calibration error model of the accelerometer,the corresponding dynamic calibration method is proposed.Finally,the second-order and high-order coefficients of the acceleration error model are calibrated,and the calibration precision of the coefficients is analyzed.Compared with traditional calibration methods,the method proposed in this paper not only greatly enhances the calibration efficiency by reducing the installing positions of the accelerometer,but also separates the centrifuge errors from the outputs of the accelerometer,which improves the accuracy and efficiency of the calibration method simultaneously.展开更多
We present a bulk micromachined in-plane capacitive accelerometer fabricated with an improved process flow,by etching only one-fifth of the wafer thickness at the back of the silicon while forming the bar-structure el...We present a bulk micromachined in-plane capacitive accelerometer fabricated with an improved process flow,by etching only one-fifth of the wafer thickness at the back of the silicon while forming the bar-structure electrode for the sensing capacitor.The improved flow greatly lowers the footing effect during deep reactive ion etching(DRIE),and increases the proof mass by 54%compared to the traditional way,resulting in both improved device quality and a higher yield rate.Acceleration in the X direction is sensed capacitively by varying the overlapped area of a differential capacitor pair,which eliminates the nonlinear behavior by fixing the parallel-plate gap.The damping coefficient of the sensing motion is low due to the slide-film damping.A large proof mass is made using DRIE,which also ensures that dimensions of the spring beams in the Y and Z directions can be made large to lower cross axis coupling and increase the pull-in voltage.The theoretical Brownian noise floor is 0.47μg/Hz1/2 at room temperature and atmospheric pressure.The tested frequency response of a prototype complies with the low damping design scheme.Output data for input acceleration from?1 g to 1 g are recorded by a digital multimeter and show very good linearity.The tested random bias of the prototype is 130μg at an averaging time of around 6 s.展开更多
A combination of large mass,weak spring and nano-grating is the key for a nano-grating accelerometer to measure nano-G acceleration.A novel compact nano-grating accelerometer integrating a large mass with nano-grating...A combination of large mass,weak spring and nano-grating is the key for a nano-grating accelerometer to measure nano-G acceleration.A novel compact nano-grating accelerometer integrating a large mass with nano-grating is proposed.First,the numbers of diffraction orders are calculated.Then,structure parameters are optimized by finite element analysis to achieve a high sensitivity in an ideal vibration mode.Finally,we design the fabrication method to form such a compact nano-grating accelerometer and successfully fabricate the uniform and well-designed nano-gratings with a period of 847 nm,crater of 451 nm by an FIB/SEM dual beam system.Based on the ANSYS simulation,a nano-grating accelerometer is predicted to work in the first modal and enables the accelerometer to have displacement sensitivity at 197 nm/G with a measurement range of±1 G,corresponding to zeroth diffraction beam optical sensitivity 1%/mG.The nano-gratings fabricated are very close to those designed ones within experimental error to lay the foundation for the sequent fabrication.These results provide a theoretical basis for the design and fabrication of nano-grating accelerometers.展开更多
基金supported by the National Key Research and Development Plan(Grant No.2024YFF0509400)the National Natural Science Foundation of China(Grant No.52305615)+1 种基金the Shaanxi Provincial Science and Technology Development Program(Grant Nos.2023-LL-QY-35,2024RS-CXTD 19)the Innovative Subject of Anhui Micro-Electro-Mechanical System(MEMS)Technology Industrial Innovation Research Institute.
摘要Accelerometers featuring high natural frequencies and superior overload capabilities are particularly valuable in applications such as military low-threshold-weapon fuzes.However,synergistic improve-ment of these parameters is bottlenecked by the trade-off between sensitivity and natural frequency,and the trade-off between natural frequency and displacement limit.Here,via designing anti-overload structures integrated with the pure-axial-stressed sensing structure,we achieve simultaneous high natural frequency and superior overload capability.The proposed sensor is fabricated and characterized.Results yield a sensitivity of 0.037±0.002 mV/g at 2 V and a natural frequency of 31.35±0.72 kHz,comparable to the reference sensor,and an overload capability of 19445.80±290.55 g representing a 133.84%improvement.Accelerometers with high natural frequency and superior overload capability enable high-fidelity measurement of broadband signals under harsh environments.
基金supported by the Key Program of the National Natural Science Foundation of China(Grant No.62435012)the General Program of the National Natural Science Foundation of China(Grant No.62375176)the General Program of the China Postdoctoral Science Foundation(Grant No.M341879).
摘要Addressing the urgent need for high-temperature vector vibration monitoring in extreme environments such as aerospace and oil exploration,this paper proposes and develops a novel accelerometer based on femtosecond laser-engraved eccentric fiber Bragg gratings(FBGs)and nickel-coated reflectors.This sensor employs a highly localized FBG with a 10 mm length and 1μm eccentricity fabricated within a single-mode fiber.It utilizes asymmetric refractive index modulation to achieve direction-sensitive cladding mode coupling.Simultaneously,a 30-nm-thick nickel film is sputter-deposited onto the fiber end-face to form a single-ended reflection structure.This design eliminates complex processes like fiber taper drawing and eccentric fusion splicing,overcoming the stability limitations of existing vector sensors at elevated temperatures.Experimental results demonstrate spectral stability across the 25℃-1020℃temperature range and effective vibration measurement at 800℃.At the room temperature and 800℃,the acceleration sensitivities are 0.169 V/g(R2=0.993)and 0.0743 V/g(R2=0.989),respectively,with a common frequency response range of 15 Hz-25 Hz.The maximum angular response sensitivities are 2.4 V/g and 1.2 V/g,respectively,fully validating its reliable vector detection capability across a wide temperature range.This study provides a compact,mechanically robust,and high-temperature-resistant solution for vibration monitoring in extreme environments.
基金funded by Vietnam National Foundation for Science and Technology Development(NAFOSTED)under grant number:02/2022/TN.
摘要This study focuses on the design and validation of a behavior classification system for cattle using behavioral data collected through accelerometer sensors.Data collection and behavioral analysis are achieved using machine learning(ML)algorithms through accelerometer sensors.However,behavioral analysis poses challenges due to the complexity of cow activities.The task becomes more challenging in a real-time behavioral analysis system with the requirement for shorter data windows and energy constraints.Shorter windows may lack sufficient information,reducing algorithm performance.Additionally,the sensor’s position on the cowsmay shift during practical use,altering the collected accelerometer data.This study addresses these challenges by employing a 3-s data window to analyze cow behaviors,specifically Feeding,Lying,Standing,and Walking.Data synchronization between accelerometer sensors placed on the neck and leg compensates for the lack of information in short data windows.Features such as the Vector of Dynamic Body Acceleration(VeDBA),Mean,Variance,and Kurtosis are utilized alongside the Decision Tree(DT)algorithm to address energy efficiency and ensure computational effectiveness.This study also evaluates the impact of sensor misalignment on behavior classification.Simulated datasets with varying levels of sensor misalignment were created,and the system’s classification accuracy exceeded 0.95 for the four behaviors across all datasets(including original and simulated misalignment datasets).Sensitivity(Sen)and PPV for all datasets were above 0.9.The study provides farmers and the dairy industry with a practical,energy-efficient system for continuously monitoring cattle behavior to enhance herd productivity while reducing labor costs.
摘要In order to suppress the influence of temperature changes on the performance of accelerometers,a digital quartz resonant accelerometer with low temperature drift is developed using a quartz resonator cluster as a transducer element.In addition,a digital intellectual property(IP) is designed in FPGA to achieve signal processing and fusion of integrated resonators.A testing system for digital quartz resonant accelerometers is established to characterize the performance under different conditions.The scale factor of the accelerometer prototype reaches 3561.63 Hz/g in the range of -1 g to +1 g,and 3542.5 Hz/g in the range of-10 g to+10 g.In different measurement ranges,the linear correlation coefficient R~2 of the accelerometer achieves greater than 0.998.The temperature drift of the accelerometer prototype is tested using a constant temperature test chamber,with a temperature change from -20℃ to 80℃.After temperature-drift compensation,the zero bias temperature coefficient falls to 0.08 mg/℃,and the scale factor temperature coefficient is 65.43 ppm/℃.The experimental results show that the digital quartz resonant accelerometer exhibits excellent sensitivity and low temperature drift.
摘要Along with process control,perception represents the main function performed by the Edge Layer of an Internet of Things(IoT)network.Many of these networks implement various applications where the response time does not represent an important parameter.However,in critical applications,this parameter represents a crucial aspect.One important sensing device used in IoT designs is the accelerometer.In most applications,the response time of the embedded driver software handling this device is generally not analysed and not taken into account.In this paper,we present the design and implementation of a predictable real-time driver stack for a popular accelerometer and gyroscope device family.We provide clear justifications for why this response time is extremely important for critical applications in the acquisition process of such data.We present extensive measurements and experimental results that demonstrate the predictability of our solution,making it suitable for critical real-time systems.
基金supported by the National Natural Science Foundation of China(62205377).
摘要A high precision detection technique is analyzed based on the optical micro electro-mechanical system(MEMS)accelerometer with double gratings for noise suppression and scale factor enhancement.The brief sensing model and modulation detection model are built using the phase sensitive detection,and the relationship between stimulated acceleration and system output is given.The schematics of gap modulation and light intensity modulation are analyzed respectively,and the choice of modulation frequency in the optical MEMS accelerometer system is discussed.According to the experimental results,the scale factor is improved from 15.45 V/g with the gap modulation to 18.78 V/g with the light intensity modulation,and the signal to noise ratio is improved from 42.95 dB to 81.73 dB.The overall noise level in the optical MEMS accelerometer is effectively suppressed.
摘要Type 2 diabetes(T2D)is a global public health issue.In 2021,537 million adults were diagnosed with T2D,corresponding to 10.5%of adults aged 20 and older.1T2D increases the risks for morbidity,disability,and premature mortality,which increased by 3%between 2000 and 2019.2 Evidence is strong that maintaining a healthy diet,engaging in regular physical activity(PA),and preventing obesity can prevent or delay the incidence of T2D.
基金Project supported by the National Natural Science Foundation of China(Grant No.32473216)Ningbo Youth Science and Technology Innovation Leading Talent Project(Grant No.2023QL004)。
摘要Vibration detection using sensors with both wide working frequency range,good sensitivity,and other good performances is a topic of great interest in fields such as inertial navigation,deep-sea fishing boat engines condition monitoring,seismic monitoring,attitude,and heading reference system,etc.This paper investigates two 6H-SIC MEMS diaphragms,one triangular and the other square,used in a fiber optic Fabry–Perot(FP)accelerometer in an experimental scenario.The triangular chip shows a wide working frequency range of 630 Hz–5300 Hz,a natural frequency of 44.3 k Hz,and a mechanical sensitivity of 0.154 nm/g.An optimal structure of the square chip used in a probe such as a fiber optic FP accelerometer also shows a wide working frequency range of 120 Hz–2300 Hz;a good sensitivity of 31.5 m V/g,a resonance frequency of7873 Hz,an accuracy of 0.96%F.S.,a frequency measurement error of 1.15%,and an excellent linearity of 0.9995.
摘要Device-based measurements are recommended to improve population-based physical activity(PA)surveillance.1,2However,implementation remains challenging due to lack of consensus on analytical methods,and the most widely used“generic”(absolute intensity)cut-point approach has limited generalisability to population-level free-living data.Further,current methods generally fail to account for differences in people's physical capacity.
基金supported by the National Natural Science Foundation of China(42276199).
摘要In order to get rid of the dependence on high-precision centrifuges in accelerometer nonlinear coefficients calibration,this paper proposes a system-level calibration method for field condition.Firstly,a 42-dimension Kalman filter is constructed to reduce impact brought by turntable.Then,a biaxial rotation path is designed based on the accelerometer output model,including orthogonal 22 positions and tilt 12 positions,which enhances gravity excitation on nonlinear coefficients of accelerometer.Finally,sampling is carried out for calibration and further experiments.The results of static inertial navigation experiments lasting 4000 s show that compared with the traditional method,the proposed method reduces the position error by about 390 m.
基金funded by the German Research Foundation[Grant Number:496846758].
摘要Objectives:Valid estimation of energy expenditure remains a challenge,particularly when using ankle-and thighworn devices.The Move 4 is a research-grade accelerometer previously tested for predicting metabolic equivalents(METs)when worn at the waist or wrist.This study aimed to calibrate and evaluate regression models to estimate METs from Move 4 data when worn at the ankle and thigh.Methods:Participants completed walking and jogging tasks under laboratory conditions while wearing Move 4 sensors and with indirect calorimetry as a reference measure.Models were calibrated using study 1(n=160)and evaluated in an independent dataset(study 2;n=15).Performance was assessed using mean absolute error(MAE),root mean square error(RMSE),and Bland-Altman analyses.Results:The MET models demonstrated strong agreement across both locations and datasets.For the thigh position,the MAE ranged from 0.60 METs(walking)to 1.38 METs(jogging),with RMSE of 0.82 and 1.70 in the evaluation data.Calibration metrics were comparable(jogging:MAE=1.24,RMSE=1.63).The ankle models showed similar accuracy,with MAEs of 0.66(walking)and 1.39(jogging),and RMSEs of 0.85 and 1.67,respectively.Systematic bias remained low(mean differences between−0.34 and−0.01 METs).Conclusions:This study provides the first calibration and evaluation for estimating METs from ankle-and thigh-worn Move 4 accelerometers.The model indicated accurate,highresolution MET estimation for walking and jogging.Future work should expand independent performance evaluations,including diverse activities such as static activities,and diverse samples under free-living conditions.
基金supports from National Natural Science Foundation of China(No.62004166)Fundamental Research Funds for the Central Universities(No.31020190QD027)+2 种基金Natural Science Basic Research Program of Shaanxi(Program No.2020JQ-199)China National Postdoctoral Program for Innovative Talents(No.BX20200279)Key Research and Development Program of Shaanxi Province(2020GXLH-Z-027,2020ZDLGY04-08).
摘要Micro-Opto-Electro-Mechanical Systems(MOEMS)accelerometer is a new type of accelerometer which combines the merits of optical measurement and Micro-Electro-Mechanical Systems(MEMS)to enable high precision,small volume and anti-electromagnetic disturbance measurement of acceleration.In recent years,with the in-depth research and development of MOEMS accelerometers,the community is flourishing with the possible applications in seismic monitoring,inertial navigation,aerospace and other industrial and military fields.There have been a variety of schemes of MOEMS accelerometers,whereas the performances differ greatly due to different measurement principles and corresponding application requirements.This paper aims to address the pressing issue of the current lack of systematic review of MOEMS accelerometers.According to the optical measurement principle,we divide the MOEMS accelerometers into three categories:the geometric optics based,the wave optics based,and the new optomechanical accelerometers.Regarding the most widely studied category,the wave optics based accelerometers are further divided into four sub-categories,which is based on grating interferometric cavity,Fiber Bragg Grating(FBG),Fabry-Perot cavity,and photonic crystal,respectively.Following a brief introduction to the measurement principles,the typical performances,advantages and disadvantages as well as the potential application scenarios of all kinds of MOEMS accelerometers are discussed on the basis of typical demonstrations.This paper also presents the status and development tendency of MOEMS accelerometers to meet the ever-increasing demand for high-precision acceleration measurement.
基金This work has received funding from 5150 Spring Specialists(05492018012)the European Union Horizon 2020 research and innovation programme under the Marie Sklodowska-Curie grant agreement No.701697,Major Program of the National Social Science Fund of China(Grant No.17ZDA092)+1 种基金Basic Research Programs(Natural Science Foundation)of Jiangsu Province(BK20180794)333 High-Level Talent Cultivation Project of Jiangsu Province(BRA2018332)and the PAPD fund.
摘要MEMS accelerometers are widely used in various fields due to their small size and low cost,and have good application prospects.However,the low accuracy limits its range of applications.To ensure data accuracy and safety we need to calibrate MEMS accelerometers.Many authors have improved accelerometer accuracy by calculating calibration parameters,and a large number of published calibration methods have been confusing.In this context,this paper introduces these techniques and methods,analyzes and summarizes the main error models and calibration procedures,and provides useful suggestions.Finally,the content of the accelerometer calibration method needs to be overcome.
基金supported by the Swedish Research Council(Grant number 2011-2976)DS is supported by an Australian National Health and Medical Research Council(NHMRC)R.D.Wright Biomedical Career Development Fellowship(Grant number GNT1123014).
摘要Purpose:This study was aimed to determine associations of accelerometer-determined time and bouts of sedentary behavior,light physical activity(LPA),and moderate-to-vigorous PA(MVPA)with sarcopenia and incident falls over 12 months.Methods:A total of 3334 Swedish 70-year-olds were assessed for sarcopenia,as defined by the revised definition of the European Working Group on Sarcopenia in Older People.Assessments were based on low scores for appendicular lean mass(dual-energy X-ray absorptiometry),hand grip strength,and the Timed Up and Go test.For 7 days after baseline,total time and total number of bouts(≥10 min of continuous activity at a given intensity)of activity performed at sedentary,LPA,and MVPA intensities were assessed by accelerometer.Incident falls were self-reported 6 months and 12 months after baseline.Results:Only 1.8%of participants had probable or confirmed sarcopenia.After multivariable adjustment for other levels of activity,only greater MVPA time was associated with a decreased likelihood of having low appendicular lean mass,low hand grip strength,and slow Timed Up and Go time as defined by the European Working Group on Sarcopenia in Older People criteria(all p0.05).Conclusion:Higher amounts of accelerometer-determined MVPA are consistently associated with a decreased likelihood of sarcopenia and its components,regardless of the length of bouts or amounts of sedentary behavior.
摘要For the purpose of improving the precision of the inertial guidance system,it is necessary to enhance the accuracy of the accelerometer.Combining the micro-fabrication processes with resonant sensor technology,a high-resolution inertial-grade novel micro resonant accelerometer is studied.Based on the detecting theory of the resonant sensors,the accelerometer is designed,fabricated,and tested.The accelerometer consists of one proofmass,two micro leverages and two double-ended-tuning-fork (DETF) resonators.The sensing principle of this accelerometer is based on that the natural frequency of the DETF resonator shifts with its axial load which is caused by inertial force.The push-pull configuration of the DETF is for temperature compensation.The two-stage micro leverage mechanisms are employed to amplify the force and increase the sensitivity of the accelerometer.The micro leverage and the resonator are modeled for static analysis and nonlinear modal analysis via theory method and finite element method (FEM),respectively.The geometrical parameters of them are optimized.The amplification factor of the leverage is 102,and the sensitivity of the resonator on theory is about 62 Hz/g.The samples of the accelerometer are fabricated with deep reactive ion etching (DRIE) technology which can get a high-aspect ratio structure for contributing a greater sensing-capacitance.The measuring results of the samples by scanning electron microscopy (SEM) show that the process is feasible,because of the complete structure,the sound combs and micro leverages,and the acceptable errors.The frequency of the resonator and the sensitivity of the accelerometer are tested via printed circuit board (PCB),respectively.The result of the test shows that the frequency of the push-resonator is about 54 530 Hz and the sensitivity of the accelerometer is about 55 Hz/g.The amplification factor of the leverage is calculated more accurately because the coupling of the two stages leverage is considered during derivation of the analysis formula.In addition,the novel differential structure of the accelerometer can greatly improve the sensitivity of the accelerometers.
摘要For the vector attitude determination, the traditional optimal algorithms which are based on quaternion estimator(QUEST) measurement noise model are complicated for just two observations. In our application, the magnetometer and accelerometer are not two comparable kinds of sensors and both are not small field-of-view sensors as well. So in this paper a new unit measurement model is derived. According to the Wahba problem, the optimal weights for each measurement are obtained by the error variance researches. Then an improved quaternion Gauss–Newton method is presented and adopted to acquire attitude. Eventually, simulation results and experimental validation employed to test the proposed method demonstrate the usefulness of the improved algorithm.
摘要This paper proposes a novel method for calibrating error coefficients of the quartz accelerometer faster on the dynamic centrifuge,which can generate a continuous dynamic acceleration excitation.Firstly,working principle and structure of the dynamic centrifuge are analyzed,the error sources and the uncertainty of the dynamic centrifuge are expounded,and relevant coordinate systems are established.Then,according to the characteristics of the input specific forces and the propagating methods of the error sources,the accurate input specific forces acted on the input reference axes of accelerometer are obtained.Based on the calibration error model of the accelerometer,the corresponding dynamic calibration method is proposed.Finally,the second-order and high-order coefficients of the acceleration error model are calibrated,and the calibration precision of the coefficients is analyzed.Compared with traditional calibration methods,the method proposed in this paper not only greatly enhances the calibration efficiency by reducing the installing positions of the accelerometer,but also separates the centrifuge errors from the outputs of the accelerometer,which improves the accuracy and efficiency of the calibration method simultaneously.
基金Project(No.NCET-06-0514)supported by the Program for New Century Excellent Talents in University,China
摘要We present a bulk micromachined in-plane capacitive accelerometer fabricated with an improved process flow,by etching only one-fifth of the wafer thickness at the back of the silicon while forming the bar-structure electrode for the sensing capacitor.The improved flow greatly lowers the footing effect during deep reactive ion etching(DRIE),and increases the proof mass by 54%compared to the traditional way,resulting in both improved device quality and a higher yield rate.Acceleration in the X direction is sensed capacitively by varying the overlapped area of a differential capacitor pair,which eliminates the nonlinear behavior by fixing the parallel-plate gap.The damping coefficient of the sensing motion is low due to the slide-film damping.A large proof mass is made using DRIE,which also ensures that dimensions of the spring beams in the Y and Z directions can be made large to lower cross axis coupling and increase the pull-in voltage.The theoretical Brownian noise floor is 0.47μg/Hz1/2 at room temperature and atmospheric pressure.The tested frequency response of a prototype complies with the low damping design scheme.Output data for input acceleration from?1 g to 1 g are recorded by a digital multimeter and show very good linearity.The tested random bias of the prototype is 130μg at an averaging time of around 6 s.
基金Supported by the National Natural Science Foundation of China under Grant No 60908016.
摘要A combination of large mass,weak spring and nano-grating is the key for a nano-grating accelerometer to measure nano-G acceleration.A novel compact nano-grating accelerometer integrating a large mass with nano-grating is proposed.First,the numbers of diffraction orders are calculated.Then,structure parameters are optimized by finite element analysis to achieve a high sensitivity in an ideal vibration mode.Finally,we design the fabrication method to form such a compact nano-grating accelerometer and successfully fabricate the uniform and well-designed nano-gratings with a period of 847 nm,crater of 451 nm by an FIB/SEM dual beam system.Based on the ANSYS simulation,a nano-grating accelerometer is predicted to work in the first modal and enables the accelerometer to have displacement sensitivity at 197 nm/G with a measurement range of±1 G,corresponding to zeroth diffraction beam optical sensitivity 1%/mG.The nano-gratings fabricated are very close to those designed ones within experimental error to lay the foundation for the sequent fabrication.These results provide a theoretical basis for the design and fabrication of nano-grating accelerometers.