Multi-beam scanning electron microscope(MBSEM)reconciles the inherent contradiction between“resolution and throughput”of traditional scanning electron microscopes(SEMs)through parallel electron beam manipulation,eme...Multi-beam scanning electron microscope(MBSEM)reconciles the inherent contradiction between“resolution and throughput”of traditional scanning electron microscopes(SEMs)through parallel electron beam manipulation,emerging as a key technology to address the bottlenecks in large-volume,high-resolution imaging and advanced industrial inspection.This article provides a comprehensive overview of MBSEM,covering its evolutionary course of technology,core design fundamentals,and interdisciplinary applications.First,it sorts out the evolutionary process from conceptualization in the early 21 st century to commercialization in the 2010s,clarifying the core logic of breaking through the physical limitations of single-beam systems via“multi-beam parallelism”.Subsequently,focusing on the core technological chain of“beam generation–optical focusing–signal detection–data processing”,it conducts an in-depth analysis of the design concepts,technical characteristics,and applicable scenarios of three mainstream architectures:the single-source single-column,split optical system,and semiconductor-specific multi-beam inspection(MBI).Combined with representative research and product data from teams such as Delft University of Technology,Zeiss,and ASML/HMI,it reveals the differentiated advantages of each architecture in beam uniformity(the relative deviation percentage of the current density and probe size of each sub-beam in the multi-beam array from the central beam,with a smaller deviation value indicating better uniformity)and signal crosstalk(the percentage of the interference signal intensity to the target signal intensity when the detection signal of a single beam in the multi-beam array interferes with the detection channel of adjacent beams)control,and throughput(the percentage of the interference signal intensity to the target signal intensity when the detection signal of a single beam in the multi-beam array interferes with the detection channel of adjacent beams)improvement.Finally,integrating the practical demands of neuroscience connectomics,advanced semiconductor manufacturing processes,and biomedicine,it elaborates on the application breakthroughs of MBSEM in the three-dimensional(3D)reconstruction of large-volume brain tissue,wafer defect screening for 7 nm and smaller nodes,and low-damage imaging of thin biological tissues,and compares its disruptive value relative to traditional technologies(single-beam SEM,optical inspection).Unlike previous reviews,this work systematically integrates both academic prototypes and industrial systems for the first time,providing an in-depth analysis of the differentiated trade-offs among imaging speed,resolution,and sample adaptability across different architectures,offering a systematic reference for MBSEM R&D and interdisciplinary applications.展开更多
Coal working face is damaged more and more seriously by water below the coal face floor. Therefore, floor water detection is a must in the process of extraction. This article aims to introducing application and princi...Coal working face is damaged more and more seriously by water below the coal face floor. Therefore, floor water detection is a must in the process of extraction. This article aims to introducing application and principle of the two-gateways parallel 3-D electrical technology and the arrangement of the observation system. The authors use this method to detect the water under the floor of a mine in north of Anhui. The results show that the two-gateways parallel 3-D electrical technology can accurately locate the water-rich areas, providing the basis for drilling drainage and grouting construction.展开更多
Cable-stayed bridge is a kind of bridge under bending pressure and tension of supporting system. The main stressed component of this kind of bridge is stay cable, which plays a vital role in the whole bridge structure...Cable-stayed bridge is a kind of bridge under bending pressure and tension of supporting system. The main stressed component of this kind of bridge is stay cable, which plays a vital role in the whole bridge structure. Based on this, this paper takes the D1 cable-stayed bridge project of Malaysia Coastal Avenue as an example to deeply explore the construction technology of parallel steel cable stayed cables of long-span cable-stayed bridges, aiming at providing scientific construction technology support for the construction of cable-stayed bridges and ensuring the quality of bridge construction.展开更多
A high-level technology is revealed that can effectively convert any distributed system into a globally programmable machine capable of operating without central resources and self-recovering from indiscriminate damag...A high-level technology is revealed that can effectively convert any distributed system into a globally programmable machine capable of operating without central resources and self-recovering from indiscriminate damages. Integral mission scenarios in Distributed Scenario Language (DSL) can be injected from any point, runtime covering & grasping the whole system or its parts, setting operational infrastructures, and orienting local and global behavior in the way needed. Many operational scenarios can be simultaneously injected into this spatial machine from different points, cooperating or competing over the shared distributed knowledge as overlapping fields of solutions. Distributed DSL interpreter organization and benefits of using this technology for integrated air and missile defense are discussed along with programming examples in this and other fields.展开更多
Data deduplication, as a compression method, has been widely used in most backup systems to improve bandwidth and space efficiency. As data exploded to be backed up, two main challenges in data deduplication are the C...Data deduplication, as a compression method, has been widely used in most backup systems to improve bandwidth and space efficiency. As data exploded to be backed up, two main challenges in data deduplication are the CPU-intensive chunking and hashing works and the I/0 intensive disk-index access latency. However, CPU-intensive works have been vastly parallelized and speeded up by multi-core and many-core processors; the I/0 latency is likely becoming the bottleneck in data deduplication. To alleviate the challenge of I/0 latency in multi-core systems, multi-threaded deduplication (Multi-Dedup) architecture was proposed. The main idea of Multi-Dedup was using parallel deduplication threads to hide the I/0 latency. A prefix based concurrent index was designed to maintain the internal consistency of the deduplication index with low synchronization overhead. On the other hand, a collisionless cache array was also designed to preserve locality and similarity within the parallel threads. In various real-world datasets experiments, Multi-Dedup achieves 3-5 times performance improvements incorporating with locality-based ChunkStash and local-similarity based SiLo methods. In addition, Multi-Dedup has dramatically decreased the synchronization overhead and achieves 1.5-2 times performance improvements comparing to traditional lock-based synchronization methods.展开更多
How to solve the coupling relations in a 6 - DOF parallel robot quickly and accurately within the limits of realtime control is a critical problem. In traditional analytic method, the complicated mathemtical model mus...How to solve the coupling relations in a 6 - DOF parallel robot quickly and accurately within the limits of realtime control is a critical problem. In traditional analytic method, the complicated mathemtical model must first be constructed and then solved by programming.Obviously, this method is not very practical. This paper,therefore, proposes a new way of approach with a new method using 3- D animation for the solving of coupling relations in the 6 - DOF parallel robot. This method is much simpler and its solving accuracy approaches that of the more complicated analytic method.展开更多
The perspective of internal structure of the decision making units (DMUs) was considered as the “black box” when employing data envelopment analysis (DEA) models. However, in the actual world there are always some D...The perspective of internal structure of the decision making units (DMUs) was considered as the “black box” when employing data envelopment analysis (DEA) models. However, in the actual world there are always some DMUs that are composed of several sub-units or subsystems, each utilizes the same inputs to generate same outputs. Numerous instances can be listed, such as a firm with a few of plants. In this paper we present models that evaluated the efficiency of DMU which is comprised of same several parallel subsystems, the foremost contribution of our work is that we take the different importance of the subsystems into account in the model, which can be obviously distinguished to the existing DEA model. Secondly, since the alternative optimal multipliers may emerge in the model, the efficiency of each subsystem may be non-unique and we simultaneously develop models of efficiency decomposition for each subsystem. At last a case of technological innovation activities of each province in China is used as an example to state the models.展开更多
Cyber-physical systems (CPS) represent a class of complex engineered systems where functionality and behavior emerge through the interaction between the computational and physical domains. Simulation provides design e...Cyber-physical systems (CPS) represent a class of complex engineered systems where functionality and behavior emerge through the interaction between the computational and physical domains. Simulation provides design engineers with quick and accurate feedback on the behaviors generated by their designs. However, as systems become more complex, simulating their behaviors becomes computation all complex. But, most modern simulation environments still execute on a single thread, which does not take advantage of the processing power available on modern multi-core CPUs. This paper investigates methods to partition and simulate differential equation-based models of cyber-physical systems using multiple threads on multi-core CPUs that can share data across threads. We describe model partitioning methods using fixed step and variable step numerical in-tegration methods that consider the multi-layer cache structure of these CPUs to avoid simulation performance degradation due to cache conflicts. We study the effectiveness of each parallel simu-lation algorithm by calculating the relative speedup compared to a serial simulation applied to a series of large electric circuit models. We also develop a series of guidelines for maximizing performance when developing parallel simulation software intended for use on multi-core CPUs.展开更多
Inverse lithography technology (ILT), a promising resolution enhancement technology (RET) used in next generations of IC manufacture, has the capability to push lithography to its limit. However, the existing meth...Inverse lithography technology (ILT), a promising resolution enhancement technology (RET) used in next generations of IC manufacture, has the capability to push lithography to its limit. However, the existing methods of ILT are either time-consuming due to the large layout in a single process, or not accurate enough due to simply block merging in the parallel process. The seamless-merging-oriented parallel ILT method proposed in this paper is fast because of the parallel process; and most importantly, convergence enhancement penalty terms (CEPT) introduced in the parallel ILT optimization process take the environment into consideration as well as environmental change through target updating. This method increases the similarity of the overlapped area between guard-bands and work units, makes the merging process approach seamless and hence reduces hot-spots. The experimental results show that seamless-merging-oriented parallel ILT not only accelerates the optimization process, but also significantly improves the quality of ILT.展开更多
基金supported by the National Key Research and Development Program of China(Grant Nos.2021YFA1200600,2024YFA1208902,and 2024YFA1408000)the National Natural Science Foundation of China(Grant Nos.52231007,12327804,T2321003,22088101,and 22405050)+1 种基金the Science and Technology Commission of Shanghai Municipality(Grant No.24ZR1406400)Shanghai Municipal Education Commission(Grant No.24KXZNA06)。
摘要Multi-beam scanning electron microscope(MBSEM)reconciles the inherent contradiction between“resolution and throughput”of traditional scanning electron microscopes(SEMs)through parallel electron beam manipulation,emerging as a key technology to address the bottlenecks in large-volume,high-resolution imaging and advanced industrial inspection.This article provides a comprehensive overview of MBSEM,covering its evolutionary course of technology,core design fundamentals,and interdisciplinary applications.First,it sorts out the evolutionary process from conceptualization in the early 21 st century to commercialization in the 2010s,clarifying the core logic of breaking through the physical limitations of single-beam systems via“multi-beam parallelism”.Subsequently,focusing on the core technological chain of“beam generation–optical focusing–signal detection–data processing”,it conducts an in-depth analysis of the design concepts,technical characteristics,and applicable scenarios of three mainstream architectures:the single-source single-column,split optical system,and semiconductor-specific multi-beam inspection(MBI).Combined with representative research and product data from teams such as Delft University of Technology,Zeiss,and ASML/HMI,it reveals the differentiated advantages of each architecture in beam uniformity(the relative deviation percentage of the current density and probe size of each sub-beam in the multi-beam array from the central beam,with a smaller deviation value indicating better uniformity)and signal crosstalk(the percentage of the interference signal intensity to the target signal intensity when the detection signal of a single beam in the multi-beam array interferes with the detection channel of adjacent beams)control,and throughput(the percentage of the interference signal intensity to the target signal intensity when the detection signal of a single beam in the multi-beam array interferes with the detection channel of adjacent beams)improvement.Finally,integrating the practical demands of neuroscience connectomics,advanced semiconductor manufacturing processes,and biomedicine,it elaborates on the application breakthroughs of MBSEM in the three-dimensional(3D)reconstruction of large-volume brain tissue,wafer defect screening for 7 nm and smaller nodes,and low-damage imaging of thin biological tissues,and compares its disruptive value relative to traditional technologies(single-beam SEM,optical inspection).Unlike previous reviews,this work systematically integrates both academic prototypes and industrial systems for the first time,providing an in-depth analysis of the differentiated trade-offs among imaging speed,resolution,and sample adaptability across different architectures,offering a systematic reference for MBSEM R&D and interdisciplinary applications.
摘要Coal working face is damaged more and more seriously by water below the coal face floor. Therefore, floor water detection is a must in the process of extraction. This article aims to introducing application and principle of the two-gateways parallel 3-D electrical technology and the arrangement of the observation system. The authors use this method to detect the water under the floor of a mine in north of Anhui. The results show that the two-gateways parallel 3-D electrical technology can accurately locate the water-rich areas, providing the basis for drilling drainage and grouting construction.
摘要Cable-stayed bridge is a kind of bridge under bending pressure and tension of supporting system. The main stressed component of this kind of bridge is stay cable, which plays a vital role in the whole bridge structure. Based on this, this paper takes the D1 cable-stayed bridge project of Malaysia Coastal Avenue as an example to deeply explore the construction technology of parallel steel cable stayed cables of long-span cable-stayed bridges, aiming at providing scientific construction technology support for the construction of cable-stayed bridges and ensuring the quality of bridge construction.
摘要A high-level technology is revealed that can effectively convert any distributed system into a globally programmable machine capable of operating without central resources and self-recovering from indiscriminate damages. Integral mission scenarios in Distributed Scenario Language (DSL) can be injected from any point, runtime covering & grasping the whole system or its parts, setting operational infrastructures, and orienting local and global behavior in the way needed. Many operational scenarios can be simultaneously injected into this spatial machine from different points, cooperating or competing over the shared distributed knowledge as overlapping fields of solutions. Distributed DSL interpreter organization and benefits of using this technology for integrated air and missile defense are discussed along with programming examples in this and other fields.
基金Project(IRT0725)supported by the Changjiang Innovative Group of Ministry of Education,China
摘要Data deduplication, as a compression method, has been widely used in most backup systems to improve bandwidth and space efficiency. As data exploded to be backed up, two main challenges in data deduplication are the CPU-intensive chunking and hashing works and the I/0 intensive disk-index access latency. However, CPU-intensive works have been vastly parallelized and speeded up by multi-core and many-core processors; the I/0 latency is likely becoming the bottleneck in data deduplication. To alleviate the challenge of I/0 latency in multi-core systems, multi-threaded deduplication (Multi-Dedup) architecture was proposed. The main idea of Multi-Dedup was using parallel deduplication threads to hide the I/0 latency. A prefix based concurrent index was designed to maintain the internal consistency of the deduplication index with low synchronization overhead. On the other hand, a collisionless cache array was also designed to preserve locality and similarity within the parallel threads. In various real-world datasets experiments, Multi-Dedup achieves 3-5 times performance improvements incorporating with locality-based ChunkStash and local-similarity based SiLo methods. In addition, Multi-Dedup has dramatically decreased the synchronization overhead and achieves 1.5-2 times performance improvements comparing to traditional lock-based synchronization methods.
摘要How to solve the coupling relations in a 6 - DOF parallel robot quickly and accurately within the limits of realtime control is a critical problem. In traditional analytic method, the complicated mathemtical model must first be constructed and then solved by programming.Obviously, this method is not very practical. This paper,therefore, proposes a new way of approach with a new method using 3- D animation for the solving of coupling relations in the 6 - DOF parallel robot. This method is much simpler and its solving accuracy approaches that of the more complicated analytic method.
摘要The perspective of internal structure of the decision making units (DMUs) was considered as the “black box” when employing data envelopment analysis (DEA) models. However, in the actual world there are always some DMUs that are composed of several sub-units or subsystems, each utilizes the same inputs to generate same outputs. Numerous instances can be listed, such as a firm with a few of plants. In this paper we present models that evaluated the efficiency of DMU which is comprised of same several parallel subsystems, the foremost contribution of our work is that we take the different importance of the subsystems into account in the model, which can be obviously distinguished to the existing DEA model. Secondly, since the alternative optimal multipliers may emerge in the model, the efficiency of each subsystem may be non-unique and we simultaneously develop models of efficiency decomposition for each subsystem. At last a case of technological innovation activities of each province in China is used as an example to state the models.
摘要Cyber-physical systems (CPS) represent a class of complex engineered systems where functionality and behavior emerge through the interaction between the computational and physical domains. Simulation provides design engineers with quick and accurate feedback on the behaviors generated by their designs. However, as systems become more complex, simulating their behaviors becomes computation all complex. But, most modern simulation environments still execute on a single thread, which does not take advantage of the processing power available on modern multi-core CPUs. This paper investigates methods to partition and simulate differential equation-based models of cyber-physical systems using multiple threads on multi-core CPUs that can share data across threads. We describe model partitioning methods using fixed step and variable step numerical in-tegration methods that consider the multi-layer cache structure of these CPUs to avoid simulation performance degradation due to cache conflicts. We study the effectiveness of each parallel simu-lation algorithm by calculating the relative speedup compared to a serial simulation applied to a series of large electric circuit models. We also develop a series of guidelines for maximizing performance when developing parallel simulation software intended for use on multi-core CPUs.
摘要Inverse lithography technology (ILT), a promising resolution enhancement technology (RET) used in next generations of IC manufacture, has the capability to push lithography to its limit. However, the existing methods of ILT are either time-consuming due to the large layout in a single process, or not accurate enough due to simply block merging in the parallel process. The seamless-merging-oriented parallel ILT method proposed in this paper is fast because of the parallel process; and most importantly, convergence enhancement penalty terms (CEPT) introduced in the parallel ILT optimization process take the environment into consideration as well as environmental change through target updating. This method increases the similarity of the overlapped area between guard-bands and work units, makes the merging process approach seamless and hence reduces hot-spots. The experimental results show that seamless-merging-oriented parallel ILT not only accelerates the optimization process, but also significantly improves the quality of ILT.